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Quasi monolithic integration of Silicon-MEMS with piezoelectric actuators for High Speed non-contact Atomic Force Microscopy
Creator
- Guliyev, Elshad
- Volland, B.E.
- Sarov, Y.
- Ivanov, Tzv.
- Klugowski, M.
- Rangelow, I.W.
- Manske, Eberhard
- Europeana
Publisher
- TU Ilmenau, Ilmenau
Type of item
- literature
Date
- 2011
- 2011
Creator
- Guliyev, Elshad
- Volland, B.E.
- Sarov, Y.
- Ivanov, Tzv.
- Klugowski, M.
- Rangelow, I.W.
- Manske, Eberhard
- Europeana
Publisher
- TU Ilmenau, Ilmenau
Type of item
- literature
Date
- 2011
- 2011
Providing institution
Aggregator
Rights statement for the media in this item (unless otherwise specified)
- http://creativecommons.org/licenses/by-nc-nd/3.0/
- http://creativecommons.org/licenses/by-nc-nd/3.0/
Rights
- http://www.dmg-lib.org/dmglib/main/portal.jsp?mainNaviState=site.oairights
Identifier
- dmg:29516009
- http://www.dmg-lib.org/dmglib/handler?docum=29516009
Language
- en
Relations
- Ilmenau University of Technology, Germany
Year
- 2011
Providing country
- Europe
Collection name
First time published on Europeana
- 2013-11-25T17:01:13.539Z
Last time updated from providing institution
- 2013-11-25T17:01:13.539Z