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A Monolithic Six Degrees-of-freedom Piezo-Micro-Positioner with Nanometer Resolution
Creator
- Europeana
- Chang, Shuo-Hung
- Tsai, Chi-Lin
- Su, Chih-Chung
Publisher
- Guanajuato, Mexico
Type of item
- literature
Date
- 2011
- 2011
Creator
- Europeana
- Chang, Shuo-Hung
- Tsai, Chi-Lin
- Su, Chih-Chung
Publisher
- Guanajuato, Mexico
Type of item
- literature
Date
- 2011
- 2011
Providing institution
Aggregator
Rights statement for the media in this item (unless otherwise specified)
- http://creativecommons.org/licenses/by-nc-nd/3.0/
- http://creativecommons.org/licenses/by-nc-nd/3.0/
Rights
- http://www.dmg-lib.org/dmglib/main/portal.jsp?mainNaviState=site.oairights
Identifier
- dmg:22527009
- http://www.dmg-lib.org/dmglib/handler?docum=22527009
Language
- en
Relations
- Ilmenau University of Technology, Germany
Year
- 2011
Providing country
- Europe
Collection name
First time published on Europeana
- 2013-11-25T16:46:19.157Z
Last time updated from providing institution
- 2013-11-25T16:46:19.157Z